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Nanolayered Composites
Kontárová, Soňa ; Salyk, Ota (oponent) ; Mistrík, Jan (oponent) ; Čech, Vladimír (vedoucí práce)
This study is aimed at the basic research of plasma polymer films and an influence of deposition conditions on structure and properties of single-layer films and multilayers prepared by PE CVD method. Single layer and multilayered a-SiC:H films were deposited on silicon wafers from tetravinylsilane monomer (TVS) at different powers in continual and pulse regimes. The films were investigated extensively by spectroscopic ellipsometry, nanoindentation, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), Rutherford Backscattering Spectrometry (RBS), X-ray reflectivity, Fourier Transform Infrared Spectroscopy (FTIR) and contact angle measurements to observe their optical, mechanical and chemical properties. The influence of the deposition condition on the physicochemical properties of pp-TVS films was revealed and quantified. Single layers were also exposed to UV light as post-deposition treatment to investigate aging effects and the influence of UV irradiation on their physical and chemical properties. Multilayered structures (bi-layered and 10-layered plasma polymerized films) of individual layer thickness down to 25 nm were successfully deposited and characterized by ellipsometric spectroscopy. Materials with tailored properties can be developed for nanocomposite applications and optical devices.
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Nanolayered Composites
Kontárová, Soňa ; Salyk, Ota (oponent) ; Mistrík, Jan (oponent) ; Čech, Vladimír (vedoucí práce)
This study is aimed at the basic research of plasma polymer films and an influence of deposition conditions on structure and properties of single-layer films and multilayers prepared by PE CVD method. Single layer and multilayered a-SiC:H films were deposited on silicon wafers from tetravinylsilane monomer (TVS) at different powers in continual and pulse regimes. The films were investigated extensively by spectroscopic ellipsometry, nanoindentation, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), Rutherford Backscattering Spectrometry (RBS), X-ray reflectivity, Fourier Transform Infrared Spectroscopy (FTIR) and contact angle measurements to observe their optical, mechanical and chemical properties. The influence of the deposition condition on the physicochemical properties of pp-TVS films was revealed and quantified. Single layers were also exposed to UV light as post-deposition treatment to investigate aging effects and the influence of UV irradiation on their physical and chemical properties. Multilayered structures (bi-layered and 10-layered plasma polymerized films) of individual layer thickness down to 25 nm were successfully deposited and characterized by ellipsometric spectroscopy. Materials with tailored properties can be developed for nanocomposite applications and optical devices.
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